发明名称 System and method for cleaning gas injectors
摘要 An injector cleaning apparatus with a concentric dual flow introducer and a flow-dispersing injector seat along with a method of cleaning an injector. The concentric dual flow introducer has concentric cleaning fluid flowpaths configured to communicate with a central passage and a plurality of peripheral passages of a gas injector. The input-side injector engaging interface of the concentric dual flow introducer and the flow-dispersing injector seat each have a compressible sealing portion having compressibility sufficient to yield under fluid cleaning surges attributable to initiation and termination of cleaning fluid flow through the injector cleaning apparatus along with resiliency sufficient to prevent abutment of the gas injector and a rigid facing portion of the input-side injector engaging interface and output-side injector engaging interface respectively.
申请公布号 US8945317(B2) 申请公布日期 2015.02.03
申请号 US201213650429 申请日期 2012.10.12
申请人 Lam Research Corporation 发明人 Avoyan Armen;La Croix Cliff;Shih Hong;Ronne Allan;Daugherty John;Zhou Catherine
分类号 B08B9/02 主分类号 B08B9/02
代理机构 Beyer Law Group LLP 代理人 Beyer Law Group LLP
主权项 1. An injector cleaning apparatus comprising a concentric dual flow introducer and a flow-dispersing injector seat, wherein: the concentric dual flow introducer comprises an inner concentric cleaning fluid flowpath configured to communicate with a central passage of a gas injector, an outer concentric cleaning fluid flowpath configured to communicate with a plurality of peripheral passages of the gas injector, and an input-side injector engaging interface comprising a compressible sealing portion and a rigid facing portion, the compressible sealing portion of the input-side injector engaging interface having compressibility sufficient to yield under cleaning fluid surges attributable to initiation and termination of cleaning fluid flow through the injector cleaning apparatus and resiliency sufficient to prevent abutment of the gas injector and the rigid facing portion of the input-side injector engaging interface and maintain an input-side injector floating gap between the gas injector and the rigid facing portion of the input-side injector engaging interface, wherein the concentric dual flow introducer interfaces with a first end of the gas injector at the input-side injector engaging interface; and the flow-dispersing injector seat comprises an output-side injector engaging interface comprising a compressible sealing portion and a rigid facing portion, the compressible sealing portion of the output-side injector engaging interface having compressibility sufficient to yield under cleaning fluid surges attributable to initiation and termination of cleaning fluid flow through the injector cleaning apparatus and resiliency sufficient to prevent abutment of the gas injector and the rigid facing portion of the output-side injector engaging interface and maintain an output-side injector floating gap between the gas injector and the rigid facing portion of the output- side injector engaging interface, the flow-dispersing injector seat interfacing with a second end of the gas injector.
地址 Fremont CA US