| 摘要 |
<p>A gas distribution assembly is disclosed. The invention comprises a rear plate; a gas distribution plate which has a fixed separating space from the rear plate and is arranged beneath the rear plate; a first groove which is formed in the rear plate; a second groove which is formed in the gas distribution plate; and a supporting member which is coupled to the first groove and the second groove, and maintains a distance between the gas distribution plate and the rear plate. According to the invention, the invention can be simply assembled without chip formation, and the distance between the rear plate and the gas distribution plate can be maintained regularly regardless of assembling method or external factor.</p> |
