发明名称 MANUFACTURING METHOD OF NANOWIRE USING ATOMIC LAYER DEPOSITION
摘要 The present invention relates to a method for manufacturing a nanowire on a base by using atomic layer deposition. Especially, the method for manufacturing a platinum nanowire of the present invention can be easily utilized for a large substrate, enables the shape and size of the nanowire to be easily adjusted, and can add other materials, thereby being suitable to produce a multifunctional catalyst.
申请公布号 KR20150012003(A) 申请公布日期 2015.02.03
申请号 KR20130087280 申请日期 2013.07.24
申请人 发明人
分类号 C23C16/06;C23C16/448;H01L21/205 主分类号 C23C16/06
代理机构 代理人
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