发明名称 CLEANING TREATMENT APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide an inexpensive cleaning treatment apparatus capable of improving cleaning capability by a slight modification and discharging waste liquid using a conventional resin pipe.SOLUTION: A cleaning treatment apparatus 10 includes: a cleaning tank 15; a cushion tank 17; a pump 18; and a heat exchanger 19. The cushion tank 17 has a first partition plate between a first chamber 21 and a second chamber 21a of four chambers: the first to fourth chambers 21, 21a, 21b and 21c which are connected to each other, a second partition plate between the third chamber and the fourth chamber, each third partition plate between a group of the first chamber and the second chamber and a group of the third chamber and the fourth chamber, and a notch part on a lower side between the second chamber and the third chamber. The cleaning treatment apparatus 10 includes: waste liquid cooling means for taking out waste liquid 16 of the cleaning tank 15 from the bottom of the first chamber after dropping the waste liquid 16 in the first chamber, passing the waste liquid 16 through the heat exchanger 19, dropping the waste liquid 16 in the third chamber, and cooling the waste liquid 16 while circulating the waste liquid 16 in the third, second and first chambers and the heat exchanger 19; and waste liquid discharge means for discharging the waste liquid 16 by making the waste liquid 16 flow from the third chamber to the fourth chamber when the waste liquid 16 fills from the first chamber to the third chamber.</p>
申请公布号 JP2015020102(A) 申请公布日期 2015.02.02
申请号 JP20130149289 申请日期 2013.07.18
申请人 NIPPON STEEL & SUMIKIN ELECTRONICS DEVICES INC 发明人 TOKIYAMA HIROSATO
分类号 B08B3/10;H01L21/304 主分类号 B08B3/10
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