| 摘要 |
<p>PROBLEM TO BE SOLVED: To achieve space saving of the power supply section, or the like, of a vapor growth apparatus.SOLUTION: A vapor growth apparatus 100 includes a board-like susceptor 30 for supporting a substrate so that a sediment can be formed at least on one side of the substrate by vapor epitaxy, and a heating section for heating the susceptor 30. The heating section has a first resistance heating element (e.g., a resistance heating element 11a), a second resistance heating element (e.g., a resistance heating element 11d) electrically connected in parallel with the first resistance heating element, and a power supply section 71 for applying a current collectively to the first resistance heating element and second resistance heating element.</p> |
