DRY DEVICE FOR ELECTRONIC COMPONENT, DRY METHOD FOR ELECTRONIC COMPONENT AND MANUFACTURING METHOD OF ELECTRONIC COMPONENT

摘要

PROBLEM TO BE SOLVED: To prevent a defect from occurring in plural thin electronic components, and to dry the respective electronic components while separating them with each other.SOLUTION: A dry device for electronic components includes: a plate-like net 132 on which plural electronic components are installed; a suction mechanism 110 that generates air blowing from the upper part of the net toward the lower part thereof, around the plural electronic components; and a vertical oscillation machine that oscillates the net in a vertical direction so that the net 132 descends at an acceleration larger than the gravitational acceleration.