| 摘要 |
PROBLEM TO BE SOLVED: To provide an eccentricity adjusting device capable of adjusting a small eccentricity amount of a disc in a short time.SOLUTION: An eccentricity adjusting device includes: a first actuator that presses down a scale disc with a predetermined load; a front stopper and a rear stopper that are disposed on a movable stage; an adjusting head that is disposed on the stage and adjusts an eccentricity amount of the scale disc by pressing an outer periphery of the scale disc while moving between the front stopper and the rear stopper; and a second actuator that presses the adjusting head toward the front stopper. A pressing force of the second actuator is set so as to be smaller than a force obtained by subtracting a friction force between the stage and the adjusting head from a sum of a static friction force between the scale disc and a shaft and a static friction force between the scale disc and the first actuator. |
