发明名称 CUTTING METHOD FOR WORK PIECE AND WIRE SAW
摘要 PROBLEM TO BE SOLVED: To provide a cutting method and a wire saw, enabling suppressing of wear of a resin layer on the surface of a resin coated wire.SOLUTION: In a cutting method for a work piece, a wire row is formed with a wire that runs in axial direction to be wound in a spiral between a plurality of wire guides. As the wire, a resin coated wire is used in which a resin is coated on the surface of a base wire. A columnar work piece is cut in wafer shape by pressing the work piece against the wire row for cut-feeding while controlling feeding speed of the work piece by supplying a process liquid to a contact part between the work piece and the wire. With a work piece feeding speed that is applied when cutting a depth of 45-65% the diameter of the work piece as a lowest feeding speed, at least in a period until a deflection of a cutting part of the wire in cut-feeding direction becomes 3 mm since cutting of the work piece is started, the work piece feeding speed is controlled to be at least five times the lowest feeding speed.
申请公布号 JP2015020235(A) 申请公布日期 2015.02.02
申请号 JP20130149057 申请日期 2013.07.18
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 TOMII KAZUYA
分类号 B24B27/06;B24B49/10;B24D11/00;B28D5/04;H01L21/304 主分类号 B24B27/06
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