| 摘要 |
<p>The invention provides a pattern forming apparatus which performs pattern formation by abutting a pattern forming area (A1) on a load bearer (BL) with a plate-shaped piece (PP) and adsorbing the plate-shaped piece (PP) to the outer side of an area (A2) opposite to the pattern forming area (A1) in the formation of the pattern. In particular, a groove-shaped opening (351) supplied with negative pressure is formed at the outer side of an area (A3) in an adsorption plate (34), wherein the area (A3) is opposite to the area (A2) of the plate-shaped piece (PP) in the formation of the pattern, and further, the outer side of the opening (351) is provided with local adsorption parts (352) for locally adsorbing the plate-shaped piece (PP).</p> |
