LOCK MEMBER AND MASK HOLDER FOR SUBSTRATE FILM DEPOSITION PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a mask holder for substrate film deposition process such that magnets having a solid structure are easily attached to high density and easily detached.SOLUTION: A mask holder for substrate film deposition process includes a first plate 110 which supports the other surface of a substrate having a mask arranged on one surface and a second plate 120 having a plurality of hole parts 130 in which magnets 140 fitted with lock members 150 on outer surfaces are accommodated respectively. An inner peripheral surface of a hole part is provided with a fixed groove part 134 where a lock member is locked by spreading of a claw part when inserted, and a detachment part 135 which is formed continuously at a peripheral-directional end part of the fixed groove part. A projection claw locked in the fixed groove part is removed from the fixed groove part by rotating the lock member and magnet by a predetermined angle up to the detachment part.