SILICONE SKELETON-CONTAINING POLYMERIC COMPOUND, CHEMICALLY AMPLIFIED NEGATIVE RESIST MATERIAL, PHOTOCURABLE DRY FILM, PATTERN FORMING METHOD, AND ELECTRIC-ELECTRONIC COMPONENT PROTECTIVE COATING

摘要

PROBLEM TO BE SOLVED: To significantly improve a problem of peeling that occurs particularly on a substrate such as SiN.SOLUTION: A silicone skeleton-containing polymeric compound is provided which has a recurring unit of formula (1) below and a weight average molecular weight of 3,000 to 500,000. In the formula, Rto Rrepresent a monovalent hydrocarbon group; l represents 0 to 100; m represents 1 to 100; a and b represent a positive number and c and d represent 0 or a positive number, satisfying a+b+c+d=1; Rrepresents a phenyl substituent containing a hydroxyl or alkoxy group, expressed by formula (4); Rrepresents a monovalent hydrocarbon group which may be the same as or different from Rto R, or a phenyl substituent containing a hydroxyl or alkoxy group, which may be the same as or different from R; and X and Y represent an organic group including a plurality of aromatic rings having a hydroxyl or glycidyl group.