发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 Provided are a semiconductor device and a method for manufacturing the semiconductor device. The method for manufacturing the semiconductor device comprises the steps of: offering a substrate including a first area and a second area; forming first mask patterns on the first area; and forming second mask patterns having a different etching selection property in comparison to the first mask patterns on the second area. The first mask patterns and the second mask patterns are formed at the same time.
申请公布号 KR20150011658(A) 申请公布日期 2015.02.02
申请号 KR20130086896 申请日期 2013.07.23
申请人 发明人
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
代理机构 代理人
主权项
地址