| 摘要 |
<p>The present invention relates to an effusion cell as a core part of a vacuum thin film manufacturing device, preventing pollution of an inner part thereof from a source material of the effusion cell which heats a crucible in a thermal radiation method. The effusion cell comprises: the crucible equipped with an opening unit on an upper portion of an inner space; and a body of the effusion cell surrounding a side and a lower portion of the crucible to be mounted. The crucible is equipped with a wing unit extended from the opening unit toward an outer side wall of the crucible, and a lip unit extended up to a predetermined length from the wing unit; bent toward a direction crossing at right angles with the extended direction of the wing unit.</p> |
