| 摘要 |
本发明公开了一种真空乾燥腔室排气系统及方法，其中，真空乾燥腔室排气系统包括：多个排气口，设置在真空乾燥腔室外；排气泵，通过排气管连接该多个排气口。本发明真空乾燥腔室排气的方法包括：在将待乾燥基板放入该真空乾燥腔室时，通过该排气泵进行排气；在真空乾燥腔室关闭后，停止通过该排气泵进行排气；在将乾燥后的基板自该真空乾燥腔室取出时，通过该排气泵进行排气。综上所述，本发明是通过在真空乾燥腔室的外部设置多个排气口，使得在腔室取放基板的过程中，能够通过真空乾燥腔室的外部的多个排气口将腔室内高浓度的溶解物的挥发气体排出，减少了在此过程中可能産生的环境危害。;A system and method for draining air from a vacuum desiccation cavity is provided. The vacuum desiccation cavity comprises a plurality of air draining openings and an air draining pump. The air draining openings are set outside the vacuum desiccation cavity, and the air draining pump is connected to the air draining openings. First, when a substrate is put into the vacuum desiccation cavity, air is drained via the air draining pump. After the vacuum desiccation cavity is sealed up, the air draining pump is turned off. When the dried substrate is taken out from the vacuum desiccation cavity, air is drained via the air draining pump. Thus, when the substrate is put in the vacuum desiccation cavity, volatile air containing soluble materials is drained from the vacuum desiccation cavity via the air drain openings. |
