| 摘要 |
一种元件制造方法包括，使保持构件去保持工件，以使该工件的被加工表面之球面中心被定位在支承构件上；藉由旋转该保持构件来旋转该工件；以及藉由移动该支承构件来将该工件移动于抛光工具上，且该被加工表面的该球面中心位在该抛光工具的加工表面的球面中心，来抛光该工件。; rotating the workpiece by rotating the holding member; and polishing the workpiece by moving the supporting member to move the workpiece on a polishing tool, with the spherical center of the processed surface located at a spherical center of a processing surface of the polishing tool. |
