遮罩基底之制造方法及涂布装置,申请号TW097124016-传众专利搜索

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发明名称	遮罩基底之制造方法及涂布装置
摘要
申请公布号	TWI471682	申请公布日期	2015.02.01
申请号	TW097124016	申请日期	2008.06.27
申请人	ＨＯＹＡ股份有限公司;ＨＯＹＡ电子马来西亚私人股份有限公司	发明人	宫田凉司;浅川敬司
分类号	G03F1/60;G03F7/16;H01L21/027;B05C5/02	主分类号	G03F1/60
代理机构		代理人	何金涂台北市大安区敦化南路2段77号8楼
主权项	一种光罩基底之制造方法，其包含有形成光阻膜之步骤，系使从收容有液状光阻剂之液槽通过喷嘴而到达喷嘴前端开口部的光阻剂，接触于具有形成转印图案用之薄膜的基板之被涂布面，并使该基板与该喷嘴相对地移动，藉以将光阻剂涂布于该被涂布面上，以形成光阻膜，该制造方法之特征为：对该被涂布面进行光阻剂之涂布中，系以使该液槽内之光阻剂的液面高度成为一定的方式，考量预先按基板尺寸设定的光阻剂涂布量，设定好光阻剂的补充量，一面朝该液槽内补充光阻剂一面进行控制。
地址	马来西亚

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