发明名称 POLISHING COMPOSITION
摘要 <p>A polishing composition that can improve polishing property without foaming is provided. A polishing composition includes a pH regulator, a water-soluble polymer compound, and a compound containing an alkylene diamine structure having two nitrogens represented by the following general formula (1), and having at least one block type polyether bonded to the two nitrogens of the alkylene structure, the block type polyether having a bond of an oxyethylene group and an oxypropylene group: where R represents an alkylene group represented by CnH2n, in which n is an integer of 1 or more.</p>
申请公布号 KR101488444(B1) 申请公布日期 2015.01.30
申请号 KR20107009372 申请日期 2008.09.29
申请人 发明人
分类号 C09K3/14;H01L21/304 主分类号 C09K3/14
代理机构 代理人
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