发明名称 FILM BAND TYPE MASK
摘要 <p>The present invention relates to a configuration of an open mask necessary in a process of depositing a material on a large area substrate in order to lower high cost and minimize inconvenience generated in existing processes such as manufacturing, attaching, alignment, lifting, and detaching of an open mask made of metal. Accordingly, a film band of which a film is coated with adhesive on the rear surface thereof is attached to a substrate except for an opening of a substrate to prepare a mask Further, as for lamination structure, a film band with a controlled adhesive can be sequentially laminated in a desired opening shape.</p>
申请公布号 KR20150011399(A) 申请公布日期 2015.01.30
申请号 KR20150001263 申请日期 2015.01.06
申请人 YAS CO., LTD. 发明人 JEONG, KWANG HO;KIM, YOUNG GUK;SHIN, DONG SHIN
分类号 H01L21/266;C23C14/04;C23C16/04 主分类号 H01L21/266
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