| 摘要 |
A gas burner, which is particularly suitable for flame treatment of substrates having large surfaces, e.g. for coating such surfaces in a combustion chemical vapor deposition (CCVD) process, includes a burner body with a gas supply connection and a nozzle plate, wherein the burner body and the nozzle plate constitute together a gas plenum and the nozzle plate constitutes a perforated wall section of the plenum. The nozzle plate includes a large number of nozzles extending from a plenum side to a flame side of the nozzle plate and it is made of a plurality of sheets which are arranged in a stack and extend substantially perpendicular or substantially parallel to the nozzle extension. The sheets include through openings, wherein the through openings of all sheets are at least partly aligned with each other, or they have a comb-like form. |
