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发明名称	素子
摘要
申请公布号	JP5659464(B2)	申请公布日期	2015.01.28
申请号	JP20090160739	申请日期	2009.07.07
申请人		发明人
分类号	H05B33/26;C23C14/14;H01L21/28;H01L21/285;H01L31/06;H05B33/14	主分类号	H05B33/26
代理机构		代理人
主权项
地址

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