发明名称 半導体デバイス、半導体デバイスを形成する方法
摘要 A semiconductor device includes first and second stacked semiconductor dies on a substrate. A lid having a plurality of fins extending downwardly into the cavity is mounted on the substrate to encapsulate the semiconductor dies. At least some of the fins are longer than other ones of said fins. The lid is attached to the substrate, with the longer fins extending downwardly above a region of the substrate not occupied by the first die. The shorter fins extend downwardly above a region of said first die not covered by said second die. A thermal interface material fills the remainder of the cavity and is in thermal communication with both dies, the substrate and the fins. The lid may be molded from metal. The lid may be bonded to the topmost die, using a thermal bonding material that may be liquid metal, or the like.
申请公布号 JP5661095(B2) 申请公布日期 2015.01.28
申请号 JP20120500014 申请日期 2010.03.15
申请人 エーティーアイ・テクノロジーズ・ユーエルシーATI TECHNOLOGIES ULC 发明人 ガマル リファイ・アハメド
分类号 H01L23/34;H01L23/36;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L23/34
代理机构 代理人
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