| 摘要 |
<p>A method for producing a piezo actuator includes: providing a green stack including alternately successive green films and inner electrode layers; forming trenches on the outside green stack in areas in which the inner electrode layers are intended to be electrically insulated from the corresponding outer electrodes, the trenches shortening the inner electrode layers from the outside of the green stack toward the inside; filling the trenches with an electrically insulating slurry; further processing the green stack, including filling the trenches with slurry, such that the green films produce piezo electric layers and the green stack produces a piezo stack; mounting two outer electrodes on the outside of the piezo stack, such that the two outer electrodes are alternately electrically connected to the inner electrode layers. The trenches may be filled with the slurry using one of the following methods; screen printing, immersion, spraying, or vacuum infiltration.</p> |
