| 摘要 |
PURPOSE:To prevent drifting due to the difference in temperature between holder and stage and shorten time to the beginning of photographing by providing a heating means to heat a sample holder in such a way as to almost equalize its temperature with that of a sample stage in a sample exchange chamber. CONSTITUTION:In the border between the sample exchange chamber 12 leading to the sample cohamber 8 through the communication hole 13 and the sample chamber 8, an air lock valve 14 to isolate them from each other is provided, and in the exchange chamber 12, a lid through which the sample holder 11 is taken out to the open air and the a sample-exchanging bar for moving the holder 11 are provided. Also, at both ends of the heating coil 15 for heating the exchange chamber 12, the differential amplifier 17 connected to the heating power source 16 and serving to obtain the difference in detected signals from the temperature detecting elements 18a, 18b, e.g., thermister, etc., attached to each of a sample stage 9 and the exchange chamber 12 is provided, and by its output signal, a heating power source 16 is controlled. Thus, the drifting of the sample can be prevented and the time to the beginning of photographing can be greatly shortened. |
