SAFETY DEVICE AND APPARATUS FOR TRANSFERRING SUBSTRATE HAVING THE SAME

摘要

The present invention relates to a safety device for a substrate transfer apparatus comprising: a light emitting part coupled to one side of a moving frame emitting a sensing light, wherein a moving base to transfer a substrate is coupled to the moving frame to be moved in a moving direction; a light receiving part coupled to the other side of the moving frame receiving the sensing light emitted from the light emitting part; and a control part which controls the moving base to stop the operation of the moving base if the amount of the light received in the light receiving part is less than a preset reference value. According to the present invention, the safety device prevents safety accidents from occurring by preventing a worker from colliding with the substrate transfer apparatus, thereby improving safety in a work environment.