TWO-ELECTRODE STRUCTURE BASED ON SEMICONDUCTOR FABRICATION TECHNIQUES
摘要
<p>The present invention relates to a two-electrode structure based on a semiconductor fabrication technique. In an electric-field-applying type fine pattern two-electrode structure for a vacuum electronic device, the two-electrode structure is easily manufactured at low process cost and satisfies high process accuracy, and also can secure the stability of property control in an electromagnetic wave process through a stable silicon photonic crystal lattice.</p>
申请公布号
KR101485341(B1)
申请公布日期
2015.01.28
申请号
KR20130110989
申请日期
2013.09.16
申请人
KOREA ELECTROTECHNOLOGY RESEARCH INSTITUTE
发明人
KIM, JAE HONG;JEON, SEOK GY;KIM, GEUN JU;KIM, JUNG IL;SHIN, DONG WON