METHOD OF PRODUCING A THREE-DIMENSIONAL METAL STRUCTURE ON FLEXIBLE SUBSTRATE

摘要

A method to manufacture a three-dimensional metal structure on a flexible substrate, provided by an embodiment of the present invention, includes: a first step of forming a metal seed layer on the flexible substrate; a second step of stacking dry film resists (DFR) layer on the metal seed layer; a third step of exposing a part of the metal seed layer by forming a primary pattern by a patterning of the DFR layer; a fourth step of forming a first metal pattern on the partially exposed metal seed layer through a plating process; a fifth step of coating the first metal pattern and the DFR layer with a photoresist (PR) layer and exposing a partial area of the first metal pattern by forming a secondary pattern by a patterning of the PR layer; a sixth step of forming a second metal pattern on an area, which is exposed from the first metal pattern, through a plating process; and a seventh step of forming a metal structure, which is formed with the first metal pattern and the second metal pattern, on the flexible substrate by removing the DFR layer and the PR layer at the same time. Accordingly, the present invention is able to prevent application of high heat on a substrate when manufacturing a metal structure on a flexible substrate by using DFR for a composition which needs a high height difference.