DETECTING METHOD OF DEFECT OF BARRIER FILM AND DETECTING APPARATUS OF DEFECT OF BARRIER FILM FOR FLAT PANEL DISPLAY DEVICE

摘要

The present invention relates to a detecting method of defects of a barrier film, and a detecting apparatus of defects of a barrier film, in which the detecting method of defects of a barrier film comprises a step of preparing a device including an electrode and a barrier film covering the electrode; a step of irradiating infrared rays to the barrier film; a step of firstly mapping by measuring the infrared transmittance to the device; a step of aging the device under the oxygen atmosphere; a step of irradiating infrared rays to the barrier film; a step of secondly mapping by measuring the infrared transmittance to the device; and a step of comparing the first map with the second map.