发明名称 Straightness measuring apparatus for line pattern on roll and Straightness measuring method for using the same
摘要 <p>The present invention relates to a straightness measuring device for a line pattern on a roll and a straightness measuring method using the same and, more specifically, to a straightness measuring device for a line pattern on a roll which measures the straightness of a line pattern formed on the surface of a roll through high-resolution using laser interference in a diffraction grid.</p>
申请公布号 KR101487440(B1) 申请公布日期 2015.01.28
申请号 KR20130064823 申请日期 2013.06.05
申请人 发明人
分类号 G01B11/24;G01B11/30;H01L21/66 主分类号 G01B11/24
代理机构 代理人
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