| 摘要 |
<p>The present invention relates to a molybdenum precursor denoted by chemical formula 1, wherein the molybdenum precursor including sulfur is allowed to improve thermal stability and volatility and has no need of adding extra sulfur when thin films are manufactured, therefore is used to manufacture quality of molybdenum sulfide thin films. In chemical formula 1, R1 is a linear or branched alkyl group of C1-C4, R2 and R3 are independently a linear or branched alkyl group of C1-C10, R4 and R5 are independently a linear or branched alkyl group of C1-C10 or a linear or branched fluoroalkyl group of C1-C10 and n is selected from integers ranging from 1 to 3.</p> |
