发明名称 ポジ型感放射線性組成物、層間絶縁膜及びその形成方法
摘要 PURPOSE: A polysiloxane system positive type radiation-sensitive composition, an inter-layer insulating film for a display device using thereof, and a producing method thereof are provided to secure the excellent heat resistance, transparency, and solvent resistance. CONSTITUTION: A polysiloxane system positive type radiation-sensitive composition contains a siloxane polymer, a quinonediazide compound, and a copolymer of a polymerizable unsaturated compound containing a compound marked with chemical formula 1, a compound marked with chemical formula 2, and a group marked with chemical formula 3.
申请公布号 JP5659714(B2) 申请公布日期 2015.01.28
申请号 JP20100252365 申请日期 2010.11.10
申请人 发明人
分类号 G03F7/075;G03F7/004;G03F7/023 主分类号 G03F7/075
代理机构 代理人
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