| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To achieve the stability improvement, deterioration prevention and discharge prevention of an X-ray generator by maintaining the degree of vacuum in the X-ray generator. <P>SOLUTION: The X-ray generator 10 of the present invention includes: an electron source 12; an extraction electrode 19 for discharging electrons from the electron source 12; and a target electrode 13 which is irradiated with the electrons discharged by the extraction electrode 19 to generate X-rays; an intermediate electrode 21 provided between the extraction electrode 19 and the target electrode 13; and vacuum holding members 26 arranged between the extraction electrode 19 and the intermediate electrode 21. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
