发明名称 クライオポンプ及び極低温冷凍機
摘要 <p>A refrigerator includes two displacers which are longitudinally adjacent to each other and the high temperature displacer includes a main compartment and an auxiliary compartment for a regenerator material. A direct passage for operating gas is formed between the two displacers. A cryopump includes a low temperature cryopanel, a radiation shield which is cooled to a higher temperature than that of the low temperature cryopanel, and the refrigerator.</p>
申请公布号 JP5660979(B2) 申请公布日期 2015.01.28
申请号 JP20110128662 申请日期 2011.06.08
申请人 发明人
分类号 F25B9/14;F04B37/08 主分类号 F25B9/14
代理机构 代理人
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