发明名称 パターン薄膜形成方法
摘要 <p>Disclosed is a pattern-forming method, which can be used so as to form an organic compound layer and a second electrode (cathode) of a thin film organic EL panel configured with a first electrode (anode), the organic compound layer, and the second electrode (cathode) using a roll-to-roll system, and which can be used so as to form a pattern thin film on a strip-like base material with a high accuracy by moving a wire-like mask in accordance with the position of the strip-like base material in the transfer direction. In the pattern thin film forming method, at least two strip-like pattern thin films are formed by depositing a pattern-forming material on the strip-like base material, which is sequentially travelling, with at least one wire-like mask between the base material and the pattern-forming material. An aligning means is attached to the strip-like base material, the position of the aligning means is detected by means of a detecting means, and the pattern thin film is formed by adjusting the position of the wire-like mask.</p>
申请公布号 JP5660041(B2) 申请公布日期 2015.01.28
申请号 JP20110527678 申请日期 2010.08.17
申请人 发明人
分类号 C23C14/04;H01L51/50;H05B33/10 主分类号 C23C14/04
代理机构 代理人
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