发明名称 |
Crystal growth furnace recharge |
摘要 |
Several embodiments of a replenishment arrangement for furnishing molten semiconductor material to furnaces for growing monocrystalline boules are described. A replenishment crucible within which a melt of the material from which the boules are to be grown is communicated either intermittently or continuously with a plurality of growth furnaces.
|
申请公布号 |
US4454096(A) |
申请公布日期 |
1984.06.12 |
申请号 |
US19810273910 |
申请日期 |
1981.06.15 |
申请人 |
SILTEC CORPORATION |
发明人 |
LORENZINI, ROBERT E.;BONORA, ANTHONY C.;LORENZ, KARL |
分类号 |
C30B15/00;C30B15/02;(IPC1-7):C30B15/12 |
主分类号 |
C30B15/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|