发明名称 Crystal growth furnace recharge
摘要 Several embodiments of a replenishment arrangement for furnishing molten semiconductor material to furnaces for growing monocrystalline boules are described. A replenishment crucible within which a melt of the material from which the boules are to be grown is communicated either intermittently or continuously with a plurality of growth furnaces.
申请公布号 US4454096(A) 申请公布日期 1984.06.12
申请号 US19810273910 申请日期 1981.06.15
申请人 SILTEC CORPORATION 发明人 LORENZINI, ROBERT E.;BONORA, ANTHONY C.;LORENZ, KARL
分类号 C30B15/00;C30B15/02;(IPC1-7):C30B15/12 主分类号 C30B15/00
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