发明名称 加工装置
摘要 <p>The invention provides a machining device, which can reduce the running cost on a cleaning room and facilities. The machining device comprises a clamping workbench for holding objects to be machined; a machining mechanism used for machining objects while supplying machining liquid at the same time; and a casing for covering the clamping workbench and the machining mechanism. The machining device is characterized by being provided with a mist machining unit for machining mists. The mist machining unit consists of a pumping pipeline and a mist removal mechanism .The pumping pipeline is connected with the interior of the casing and is used for pumping mists generated during the machining process. The mist removal mechanism is connected with the pumping pipeline and is used for removing mists from air. The mist removal mechanism consists of an anti-mist unit and a fan unit.</p>
申请公布号 JP5660903(B2) 申请公布日期 2015.01.28
申请号 JP20110008510 申请日期 2011.01.19
申请人 发明人
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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