| 摘要 |
<p>The present invention relates to an Ag alloy target, a method for manufacturing the same, and a thin film formed by using the Ag alloy target used for a reflection film, a reflection electrode film, an electrode film, a wire, etc. of an electronic component. The purpose of the present invention is to provide the Ag alloy target and the method for manufacturing the same having a thermally stable and uniform micro crystal particle. Also, the purpose of the present invention is to provide the thin film formed by using the Ag alloy target.</p> |
