THIN-FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME

摘要

A thin film transistor substrate includes: a gate pattern which includes a base substrate, a gate line formed on the base substrate, and a gate electrode connected to the gate line; a data line intersecting with the gate line; a source pattern which includes a source electrode connected to the data line, and a drain electrode separated from the source electrode; and a buffer pattern formed on the source pattern. The buffer pattern is formed on the source/drain electrode. The re-sputtering of Cu due to a plasma process is prevented before a passivation layer is formed, thereby preventing the contamination of CVD equipment.