| 摘要 |
<p>An object of the present invention is to provide a pressure-operated valve which can suppress chattering of a diaphragm body. A pressure-operated valve (1) includes a plurality of stacked thin metal films (51). Each of the thin metal films (51) includes a ring-shaped flat plate unit (53) and a pointed protrusion unit (54) connected to an inner edge of the ring-shaped flat plate unit (53). Also, a valve port (16) is opened and closed by a movement of a central portion (C) of the protrusion unit (54) of the nearest thin metal film (51). When the valve port (16) is closed, the central portion (C) of the protrusion unit (54) of the nearest thin metal film (51) is arranged to push a position corresponding to the central portion (C) in a reverse operation starting position (P1) toward the direction of the reverse operation, and a portion of the protrusion unit (54) besides the central portion (C) is deformed in advance in a form disposed in front of a position corresponding to the portion besides the central portion (C).</p> |
