| 摘要 |
According to the present invention, a filter used for filtration of a resist remover liquid, which has removed a positive resist from a substrate, is recycled for reuse as a filtration filter by removing the resist therefrom. By immersing a used resist remover liquid filtration filter in a cleaning liquid for resist remover liquid filtration filters, said cleaning liquid containing 2.5-12.5% by mass of ammonia relative to the total mass of the cleaning liquid and 8.8-17.5% by mass of hydrogen peroxide relative to the total mass of the cleaning liquid, a resist adhering to the filtration filter is able to be removed, thereby enabling reuse of the resist remover liquid filtration filter. |
