发明名称 GAS CELL, METHOD OF MANUFACTURING GAS CELL, ATOMIC OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING BODY
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a gas cell in which transpiration of the sealed metal is suppressed.SOLUTION: A method of manufacturing a gas cell includes: a step for preparing metal, a base substrate having a bottomed hole opened to a first surface and a substrate for sealing; a step for overlapping the sealing substrate on the first substrate so as to enclose the metal in a hole; a first joining step for having a sealing region surrounding an opening and a joining region surrounding the sealing region and heating and joining the base substrate and the sealing substrate in the joining region; and a second joining step for heating and joining the base substrate and the sealing substrate in the sealing region and sealing the hole.
申请公布号 JP2015015278(A) 申请公布日期 2015.01.22
申请号 JP20130139527 申请日期 2013.07.03
申请人 SEIKO EPSON CORP 发明人 CHINDO KOJI
分类号 H01S1/06;H03L7/26 主分类号 H01S1/06
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