| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a coating film by coating a substrate having height differences with a coating liquid by which a coating film with less height differences can be formed while suppressing the influence of height differences on a substrate.SOLUTION: A method for forming a coating film comprises the steps of: heating a substrate coated with a coating liquid at a first temperature equal to or higher than a volatilization temperature of solvent of the coating liquid, and lower than a glass transition point; then, heating the substrate at a second temperature equal to or higher than a glass transition point of the coating liquid, and lower than a start temperature of crosslink of the coating liquid; and then, heating the substrate at a third temperature equal to or higher than the start temperature of crosslink of the coating liquid, and lower than a decomposition temperature of material of the coating film to form the coating film. The heat treatments on the substrate are performed by irradiating the substrate with light. |
