发明名称 VIBRATOR, ELECTRONIC DEVICE, ELECTRONIC EQUIPMENT, AND MOBILE BODY
摘要 PROBLEM TO BE SOLVED: To provide a vibrator capable of easily canceling an angular velocity signal or an acceleration signal detected even in a state in which an angular velocity or acceleration is not added to a sensor element.SOLUTION: A vibrator comprises: a base; a detection arm extending from the base; a first connection part extending in a direction crossing an extension direction of the detection arm from one end of the base; a second connection part extending in a direction crossing the extension direction of the detection arm from the other end of the base; a first vibration arm extending in a direction crossing an extension direction of the first connection part from the first connection part; and a second vibration arm extending in a direction crossing an extension direction of the second connection part from the second connection part. The first and second connection parts include a piezoelectric part.
申请公布号 JP2015014517(A) 申请公布日期 2015.01.22
申请号 JP20130141367 申请日期 2013.07.05
申请人 SEIKO EPSON CORP 发明人 ICHIKAWA FUMIO
分类号 G01C19/5607;H01L41/113 主分类号 G01C19/5607
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