发明名称 CUTTING DEVICE AND SETUP METHOD
摘要 <p>PROBLEM TO BE SOLVED: To implement efficiently adjustment of a reference position of infeed corresponding to wear of a cutting blade.SOLUTION: In a cutting device, a light receiving part 32 receives light projected from a light projecting part 31, and provided is tip recognition means 30a which recognizes a tip of the cutting blade 29 when a light receiving amount at the light receiving part 32 becomes a specified threshold value through blocking of the light projected from the light projecting part 31 by a cutting blade 29 positioning between the light projecting part 31 and the light receiving part 32. In a calculation part, cutting means 20a is moved to the direction of getting apart from a holding table, and, based on the position in the Z-axis direction of the cutting means 20a when the tip recognition means 30a recognizes the tip of the cutting blade 29, the position in the Z-axis direction of the cutting means 20a when the tip of the cutting blade 29 contacts to the holding table is calculated. Since it is not necessary to retract the holding table, adjustment of the reference position of the infeed corresponding to the wear of the cutting blade 29 can be implemented efficiently.</p>
申请公布号 JP2015013333(A) 申请公布日期 2015.01.22
申请号 JP20130140601 申请日期 2013.07.04
申请人 DISCO ABRASIVE SYST LTD 发明人 KIMURA KEN;URAYAMA TAKAYO
分类号 B24B49/12;B24B27/06;H01L21/301 主分类号 B24B49/12
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