| 发明名称 |
NOISE REDUCTION TECHNIQUES, FRACTIONAL BI-SPECTRUM AND FRACTIONAL CROSS-CORRELATION, AND APPLICATIONS |
| 摘要 |
A measurement method and system include illuminating an object to be measured with light at two different wavelengths and an incident angle; capturing an image of the object; detecting a frequency of an interference pattern from the image using Fractional Bi-Spectrum Analysis; and calculating a thickness of the object based on the Fractional Bi-Spectrum Analysis. The thickness is calculated based on a relationship between the thickness and the frequency of the interference pattern. The Fractional Bi-Spectrum Analysis is performed on a linear medium with the two different wavelengths being known. |
| 申请公布号 |
US2015022658(A1) |
申请公布日期 |
2015.01.22 |
| 申请号 |
US201414332948 |
申请日期 |
2014.07.16 |
| 申请人 |
FARAHI Faramarz;BABAIE Gelareh;ABOLBASHARI Mehrdad |
发明人 |
FARAHI Faramarz;BABAIE Gelareh;ABOLBASHARI Mehrdad |
| 分类号 |
G01B9/02;G01B11/06 |
主分类号 |
G01B9/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A measurement method comprising:
illuminating an object to be measured with light at two different wavelengths and an incident angle; capturing an image of the object; detecting a frequency of an interference pattern from the image using Fractional Bi-Spectrum Analysis; and calculating a thickness of the object based on the Fractional Bi-Spectrum Analysis. |
| 地址 |
Charlotte NC US |
