发明名称 |
CF4 GAS CONCENTRATION MEASUREMENT METHOD AND CF4 GAS CONCENTRATION MEASUREMENT DEVICE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a gas concentration measurement method and a concentration measurement device that enable concentration of CFgas in test gas including CFand CFto be easily detected with high reliability.SOLUTION: A gas concentration of CFgas in test gas including CFgas and CFgas is measured by the procedures of: (1) acquiring gas concentration of CFgas on the basis of absorbance by the CFgas of an infrared ray in a second wavelength region in which a center wavelength is 9035±50 nm; (2) acquiring an output component regarding the CFgas in a gas detection output in accordance with an amount of the infrared ray in a first wavelength region in which the center wavelength is 7850±50 nm on the basis of the CFgas concentration, and acquiring an output component regarding the CFgas in the gas detection output; and (3) acquiring gas concentration of the CFgas on the basis of a correction output having the output component regarding the CFgas corrected by a correction factor corresponding to the CFgas concentration.</p> |
申请公布号 |
JP2015014559(A) |
申请公布日期 |
2015.01.22 |
申请号 |
JP20130142478 |
申请日期 |
2013.07.08 |
申请人 |
RIKEN KEIKI CO LTD |
发明人 |
SANO RYOTA;YOSHIDA NORIKAZU |
分类号 |
G01N21/3504;H01L21/205;H01L21/3065 |
主分类号 |
G01N21/3504 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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