FLOW SENSOR AND VACUUM SUCTION DEVICE AND CHIP MOUNTER USING SAME

摘要

The purpose of the present invention is to provide a flow sensor capable of measuring the flow of a fluid in a pipe having a small pipe diameter. A flow sensor (1) that is disposed within piping and is for measuring the flow velocity of a fluid in the piping is provided with an intake flow path (9) that is for taking in fluid to be measured from the main flow path in the piping and has at least one bending point. This intake flow path (9) has a fluid intake port (7) that opens toward the main flow path in the piping and a fluid return port (8) that returns the measured fluid to the inside of the piping. Further, detection units (2, 3) for detecting the flow velocity of the fluid are disposed within the intake flow path (9) in an area different from the area extending from the fluid intake port (7) in parallel to the main flow path.