| 摘要 |
PROBLEM TO BE SOLVED: To swiftly evaluate with a simple method the state of the surface of a substrate to be applied with a droplet from a coating head.SOLUTION: A substrate inspection method is a method for evaluating the state of a droplet mark which is formed on a substrate by ejecting droplet over the substrate plural nozzle holes formed on a coating head. The method includes the steps of: forming droplet marks of a lattice-like pattern in a whole area of the substrate by ejecting droplets from a coating head above the substrate over the whole area of the substrate; taking an image of the droplet marks on the whole area of the substrate using a camera disposed above the upper surface of the substrate while irradiating the substrate with the droplet marks formed thereon; and checking the color of all droplet marks in the whole area of the substrate by binarizing the gray value of the taken image. |
