Port Door Positioning Apparatus and Associated Methods

摘要

A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.

主权项

1. An apparatus, comprising:
a port door; a frame defined to have an opening through which the port door interfaces with a container door, the container door associated with a container configured to carry at least one workpiece within a semiconductor fabrication facility; a first stationary cam plate affixed to the frame at a position along a first side of the opening of the frame, the first stationary cam plate having formed therein a first channel angled toward the frame; a second stationary cam plate affixed to the frame at a position along a second side of the opening of the frame, the second side substantially opposite the first side relative to the opening of the frame, the second stationary cam plate having formed therein a second channel angled toward the frame; a first movable closure mechanism secured to the port door and defined to move relative to both the port door and the frame, a portion of the first moveable closure mechanism defined to fit within and move along the first channel of the first stationary cam plate as the first moveable closure mechanism moves relative to both the port door and the frame; and a second movable closure mechanism secured to the port door and defined to move relative to both the port door and the frame, a portion of the second moveable closure mechanism defined to fit within and move along the second channel of the second stationary cam plate as the second moveable closure mechanism moves relative to both the port door and the frame.