| 摘要 |
<p>PROBLEM TO BE SOLVED: To adhesively hold a workpiece in a freely removable manner by driving a movable element in a non-contact state without decentering.SOLUTION: Since a plurality of bellows 11 and 11' are concentrically disposed inwards and outwards as an elongation/contraction part 10 of an actuator A, by deforming the bellows 11 and 11' to be elongated/contracted, the elongation/contraction part 10 is not deformed at all in any XYθdirection than an elongating/contracting deformation direction (Z direction). Therefore, via a lift part 20 of the bellows 11 and 11', a movable element 40 reciprocates within a central space 12 of the elongation/contraction part 10 without decentering in any other XYθdirection than the elongating/contracting deformation direction (Z direction). By bringing a pressing part 41 of the movable element 40 into contact with a workpiece W with the elongating/contracting deformation of the elongation/contraction part 10, adhesive holding or the like is performed by an adhesive member 70. With inverse elongating/contracting deformation of the elongation/contraction part 10, by separating the pressing part 41 of the movable element 40 from the workpiece W, releasing from the adhesive member 70 or the like is performed.</p> |
