ANNEALING FURNACE FOR WATER REMOVAL UNIT WITH A GAS FLOW RATE MEASURING DEVICE AND ITS CONTROL METHOD

摘要

Disclosed is a gas flow rate measuring unit for an annealing furnace having a water removal unit. The gas flow rate measuring unit for the annealing furnace includes: a plurality of bodies spaced apart from each other by a predetermined distance on the gas flow rate measuring unit; a differential pressure generator to collect a gas dynamic pressure and a gas static pressure in the annealing furnace; an dynamic pressure impulse line connected with a dynamic port of the differential pressure generator; a static pressure impulse line connected with the static port of the differential generator; a differential voltage measuring unit to measure the differential voltage between the dynamic voltage and the static voltage transmitted through the impulse lines, respectively; a moisture removal unit to remove moisture by cleaning the inner part of each impulse line by nitrogen; a dynamic pressure valve block interposed between the dynamic impulse line of the body and the differential pressure measuring unit to connect the dynamic impulse line with the differential pressure measuring unit; a static pressure valve block interposed between the static impulse line of the body and the differential voltage measuring unit to connect the static pressure impulse line with the differential pressure measuring unit; and a differential voltage zero valve to allow the dynamic valve block and the static valve block to selectively communicate with atmosphere to make the differential voltage a zero voltage.